Titanium infiltration into ultrathin PMMA brushes
Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...
Spremljeno u:
| Glavni autor: | |
|---|---|
| Daljnji autori: | , , , , |
| Format: | Artículo |
| Jezik: | en_US |
| Izdano: |
2021
|
| Teme: | |
| Online pristup: | https://doi.org/10.1116/6.0001061 https://avs.scitation.org/doi/abs/10.1116/6.0001061 |
| Oznake: |
Dodaj oznaku
Bez oznaka, Budi prvi tko označuje ovaj zapis!
|
