Titanium infiltration into ultrathin PMMA brushes

Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...

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Bibliographic Details
Main Author: Mani Gonzalez, Pierre Giovanni
Other Authors: McFeely, Caitlin, Snelgrove, Matthew, Shiel, Kyle, Hernandez-Marquez, Jesus Alfredo, O Connor, Robert
Format: Artículo
Published: 2021
Online Access:https://doi.org/10.1116/6.0001061
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