Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor

Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor

This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling purposes, we divided the thermal sensor into four...

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Библиографические подробности
Главный автор:	Gomez, Maribel
Другие авторы:	Ramírez, Treviño, Figueras, Edward, Sauceda, Angel
Формат:	Artículo
Язык:	en_US
Опубликовано:	2018
Предметы:	MEMS thermal sensor thermal resistance thermoelectrical characterization microcalorimeter info:eu-repo/classification/cti/1
Online-ссылка:	http://smctsm.org.mx/ojs/index.php/SyV/article/view/65/176
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

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