Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor
This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling purposes, we divided the thermal sensor into four...
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| Main Author: | |
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| Other Authors: | , , |
| Format: | Artículo |
| Language: | en_US |
| Published: |
2018
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| Subjects: | |
| Online Access: | http://smctsm.org.mx/ojs/index.php/SyV/article/view/65/176 |
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