Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor
This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling purposes, we divided the thermal sensor into four...
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| Outros autores: | , , |
| Formato: | Artículo |
| Idioma: | en_US |
| Publicado: |
2018
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| Subjects: | |
| Acceso en liña: | http://smctsm.org.mx/ojs/index.php/SyV/article/view/65/176 |
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