Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

The growth chemistry and electrical performance of 5 nm alumina films, fabricated via the area-selective vapor phase infiltration (VPI) of trimethylaluminum into poly(2-vinylpyridine), are compared to a conventional plasma enhanced atomic layer deposition (PEALD) process. The chemical properties are...

保存先:

書誌詳細
その他の著者:	Snelgrove, Matthew, Mani Gonzalez, Pierre Giovanni, McFeely, Caitlin, Hughes, Gregory, Weiland, C, Woicik, Joshep, Shiel, Kyle, Ornelas, Carlos, Solis-Canto, Óscar, Cherkaoui, K, Hurley, P, Yadav, Pravind, Morris, Michael, McGlynn, Enda, O'Connor, Rob
フォーマット:	Artículo
言語:	English
出版事項:	2022
主題:	info:eu-repo/classification/cti/7
オンライン･アクセス:	https://doi.org/10.1016/j.mee.2022.111888 https://www.sciencedirect.com/science/article/pii/S0167931722001824
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

類似資料

Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process
出版事項: (2021)

Titanium infiltration into ultrathin PMMA brushes
著者:: Mani Gonzalez, Pierre Giovanni
出版事項: (2021)

Precise Definition of a “Monolayer Point” in Polymer Brush Films for Fabricating Highly Coherent TiO2 Thin Films by Vapor-Phase Infiltration
出版事項: (2020)

Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach
出版事項: (2020)

Laser Fluence Dependence of the Electrical Properties of MoO2 Formed by High Repetition Femtosecond Laser Pulses
著者:: Camacho, Santiago
出版事項: (2018)

Phase composition and its effect on the mechanical performance of an AlCoCrFeNiTi high-entropy alloy
著者:: Rodriguez Gonzalez, Claudia
出版事項: (2022)

Lucha entre una locomotora eléctrica y una de vapor, en los talleres de Erie de la General Electric Company de Nueva York=Tug war between an electric and steam locomotive at the Erie works of the General Electric Company /

Paseillo=Forming the "cuadrillas" /

Systematic Reviews as process of artificial selection of scientific knowledge in the healthcare area:
著者:: Oscar Eliezer Mendoza De Los Santos
出版事項: (2021)

Modulatory effects of main Mango (Mangifera indica L. cv. “Ataulfo”) phenolics on the growth of selected probiotic and pathogenic bacteria
著者:: Pacheco-Ordaz, R.
出版事項: (2018)

Dynamics for an electric pendulum
著者:: Aguilar Loreto, Omar
出版事項: (2019)

[Barco de Vapor] /
出版事項: (1909)

[Vapor Río Bravo] /

[Barco de Vapor] /
出版事項: (1909)

[Barco de Vapor] Tampico /
出版事項: (1909)

Preparation of Silver-Doped Alumina Spherical Beads with Antimicrobial Properties
著者:: Roque Ruiza, Jose Hafid
出版事項: (2018)

Preparation of silver-doped alumina spherical beads with antimicrobial properties
著者:: Espinosa Cristóbal, León Francisco
出版事項: (2018)

Muelle del Vapor Tritón : Tampico /

Arriving at Main Park by Electric Power : Matamoros, México /

Arriving at Main Park by Electric Power : Matamoros, Mexico /

Determinants of the location of electrical-electronic sector in Mexico
著者:: Adán Jacinto Flores Flores, 等
出版事項: (2022)

Global Electricity Consumption, Sustainable Generation and Renewable Energy
著者:: Tilvaldyev, Shehret
出版事項: (2019)

In vitro evaluation of poly-ε-caprolactone-hydroxypatite-alumina electrospun fibers on the fibroblast’s proliferation
著者:: Reyes-López, Simón Yobanny
出版事項: (2020)

Analysis of mechanical and electrical imperfect contacts in piezoelectric composites
著者:: López Realpozo, Juan Carlos
出版事項: (2018)

Improvements in the thermomechanical and electrical behavior of hybrid carbon-epoxy nanocomposites
出版事項: (2021)

Economic growth, corruption and institutions in Mexico
著者:: Lucía Ramírez López, 等
出版事項: (2021)

Process capability index for AC transformer under electrical harmonics
著者:: Méndez-González, Luis Carlos
出版事項: (2018)

Transcranial electrical current stimulation (tdcs): a literature review
著者:: Salma Ávila Gómez, 等
出版事項: (2022)

α and γ Alumina Spheres for Azo Dye (Allura Red) Removal from Aqueous Media
著者:: Torres Perez, Jonatan
出版事項: (2022)

Interdependent Projects Selection with Preference Incorporation
著者:: Gómez, Claudia
出版事項: (2018)

Project portfolio selection with scheduling: an evolutionary approach
著者:: Martínez-Vega, Daniel
出版事項: (2019)

Review of concentration-dispersion through housing density and its effect on urban form
著者:: Jorge Javier Acosta Rendón
出版事項: (2018)

Weibull Reliability Method for Several Fields Based Only on the Modeled Quadratic Form
著者:: Piña Monarrez, Manuel Román
出版事項: (2021)

Is there a correct form to teach? Teaching styles and teaching in high levels at Cuauhtémoc
著者:: Karla Ivonne Gonzalez Torres, 等
出版事項: (2023)

Escena de la conquista=Scene form the conquest : Palacio de Cortés-Cuernavaca, México. Fresco de Diego Rivera /

Effective Complex Properties for Three-Phase Elastic Fiber-Reinforced Composites with Different Unit Cells
出版事項: (2021)

Vapor Príncipe Joachim en el Río Pánuco : Tampico /

Eating disorders and their associations with physical form and body composition in young adults: sistematic review
著者:: David Olivas-Dávila, 等
出版事項: (2018)

Regional analysis of economic growth and employment in the state of Sonora
著者:: Joaquín Bracamontes Nevárez, 等
出版事項: (2021)

Economic growth in China during the world financial crisis
著者:: Pedro A. Villezca Becerra
出版事項: (2021)