Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration

The growth chemistry and electrical performance of 5 nm alumina films, fabricated via the area-selective vapor phase infiltration (VPI) of trimethylaluminum into poly(2-vinylpyridine), are compared to a conventional plasma enhanced atomic layer deposition (PEALD) process. The chemical properties are...

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書目詳細資料
其他作者:	Snelgrove, Matthew, Mani Gonzalez, Pierre Giovanni, McFeely, Caitlin, Hughes, Gregory, Weiland, C, Woicik, Joshep, Shiel, Kyle, Ornelas, Carlos, Solis-Canto, Óscar, Cherkaoui, K, Hurley, P, Yadav, Pravind, Morris, Michael, McGlynn, Enda, O'Connor, Rob
格式:	Artículo
語言:	English
出版:	2022
主題:	info:eu-repo/classification/cti/7
在線閱讀:	https://doi.org/10.1016/j.mee.2022.111888 https://www.sciencedirect.com/science/article/pii/S0167931722001824
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