Titanium infiltration into ultrathin PMMA brushes

Titanium infiltration into ultrathin PMMA brushes

Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...

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書誌詳細
第一著者:	Mani Gonzalez, Pierre Giovanni
その他の著者:	McFeely, Caitlin, Snelgrove, Matthew, Shiel, Kyle, Hernandez-Marquez, Jesus Alfredo, O Connor, Robert
フォーマット:	Artículo
言語:	en_US
出版事項:	2021
主題:	info:eu-repo/classification/cti/7
オンライン･アクセス:	https://doi.org/10.1116/6.0001061 https://avs.scitation.org/doi/abs/10.1116/6.0001061
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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