Titanium infiltration into ultrathin PMMA brushes
Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...
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| Auteur principal: | |
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| Autres auteurs: | , , , , |
| Format: | Artículo |
| Langue: | en_US |
| Publié: |
2021
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| Sujets: | |
| Accès en ligne: | https://doi.org/10.1116/6.0001061 https://avs.scitation.org/doi/abs/10.1116/6.0001061 |
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