Titanium infiltration into ultrathin PMMA brushes
Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...
Saved in:
| Hovedforfatter: | |
|---|---|
| Andre forfattere: | , , , , |
| Format: | Artículo |
| Sprog: | en_US |
| Udgivet: |
2021
|
| Fag: | |
| Online adgang: | https://doi.org/10.1116/6.0001061 https://avs.scitation.org/doi/abs/10.1116/6.0001061 |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|
Vær først til at give en kommentarø!