Titanium infiltration into ultrathin PMMA brushes
Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions co...
Guardat en:
| Autor principal: | |
|---|---|
| Altres autors: | , , , , |
| Format: | Artículo |
| Idioma: | en_US |
| Publicat: |
2021
|
| Matèries: | |
| Accés en línia: | https://doi.org/10.1116/6.0001061 https://avs.scitation.org/doi/abs/10.1116/6.0001061 |
| Etiquetes: |
Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|
Sigues el primer a deixar un comentari!