Design and Construction of a Compact Rotary Substrate Heater for Deposition Systems
We have designed and constructed a compact rotary substrate heater for the temperature range of 25 °C to 700 °C. The heater can be implemented in any deposition system where crystalline samples are needed. Its main function is to provide heat treatment in situ during film growth. The temperature i...
Kaydedildi:
Yazar: | Perez, Israel |
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Diğer Yazarlar: | Elizalde Galindo, Jose Trinidad, Netro, Tareik |
Materyal Türü: | Artículo |
Dil: | en_US |
Baskı/Yayın Bilgisi: |
2020
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Konular: | |
Online Erişim: | https://doi.org/10.1186/s12645-020-00060 https://cdnsciencepub.com/doi/abs/10.1139/cjp-2019-0530 |
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