Design and Construction of a Compact Rotary Substrate Heater for Deposition Systems

Design and Construction of a Compact Rotary Substrate Heater for Deposition Systems

We have designed and constructed a compact rotary substrate heater for the temperature range of 25 °C to 700 °C. The heater can be implemented in any deposition system where crystalline samples are needed. Its main function is to provide heat treatment in situ during film growth. The temperature i...

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Главный автор:	Perez, Israel
Другие авторы:	Elizalde Galindo, Jose Trinidad, Netro, Tareik
Формат:	Artículo
Язык:	en_US
Опубликовано:	2020
Предметы:	Heater info:eu-repo/classification/cti/1
Online-ссылка:	https://doi.org/10.1186/s12645-020-00060 https://cdnsciencepub.com/doi/abs/10.1139/cjp-2019-0530
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

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