On the development and characterization of a MOEMS based bidirectional flowmeter

In this work we provide: a) detail description of the MEMS sensing element device including its design parameters, FEA analysis, b) fabrications steps, c) integration into a 3D printed prototyping package and a collecting force part, and d) the optical setup of the interferometric reading of MEMS po...

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Main Author: Mireles Jr. Garcia, Jose
Other Authors: Jimenez Perez, Abimael
Format: Memoria en abstract
Language: spa
Published: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2018
Online Access: http://cathi.uacj.mx/20.500.11961/5559
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