Thermoelectrical characterization and comparative analysis of three finite element models of a MEMS thermal sensor

This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling purposes, we divided the thermal sensor into four...

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Bibliographic Details
Main Author: Gomez, Maribel
Other Authors: Ramírez, Treviño, Figueras, Edward, Sauceda, Angel
Format: Artículo
Published: 2018
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