Influence of post‑deposition annealing on the chemical states of crystalline tantalum pentoxide films
We investigate the effect of post-deposition annealing (for temperatures from 848 K to 1273 K) on the chemical properties of crystalline Ta2O5 films grown on Si(100) substrates by radio frequency magnetron sputtering. The atomic arrangement, as determined by X-ray diffraction, is predominately hex...
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| Other Authors: | , , , , , |
| Format: | Artículo |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/s00339-018-2198-9 https://link.springer.com/article/10.1007/s00339-018-2198-9 |
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| Summary: | We investigate the effect of post-deposition annealing (for temperatures from 848 K to 1273 K) on the chemical properties
of crystalline Ta2O5 films grown on Si(100) substrates by radio frequency magnetron sputtering. The atomic arrangement,
as determined by X-ray diffraction, is predominately hexagonal ( − Ta2O5 ) for the films exposed to heat treatments at
948 K and 1048 K; orthorhombic ( − Ta2O5 ) for samples annealed at 1148 K and 1273 K; and amorphous for samples
annealed at temperatures below 948 K. X-ray photoelectron spectroscopy for Ta 4f and O 1s core levels were performed to
evaluate the chemical properties of all films as a function of annealing temperature. Upon analysis, it is observed the Ta 4f
spectrum characteristic of Ta in Ta5+ and the formation of Ta-oxide phases with oxidation states Ta1+ , Ta2+ , Ta3+ , and Ta4+ .
The study reveals that the increase in annealing temperature increases the percentage of the state Ta5+ and the reduction of
the others indicating that higher temperatures are more desirable to produce Ta2O5 , however, there seems to be an optimal
annealing temperature that maximizes the O% to Ta% ratio. We found that at 1273 K the ratio slightly reduces suggesting
oxygen depletion. |
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